Manufacture of miniature bioparticle electromanipulators by excimer laser ablation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3274, Issue , 1998, Pages 152-160

  Gower, Malcolm C ^a   Harvey, Erol C ^a   Rizvi, Nadeem H ^a   Rumsby, Phil T ^a   Burt, Julian P H ^a   Talary, Mark S ^a   Tame, Jon A ^a   Pethig, Ron ^a  

^a Exitech Ltd   (United Kingdom)

Author keywords

Biosensors; Excimer lasers; Micromachining

Indexed keywords

BIOSENSORS; ELECTRIC FIELD EFFECTS; ELECTRIC INSULATORS; ELECTROPHORESIS; EXCIMER LASERS; MANIPULATORS; MICROELECTRODES; MICROMACHINING;

DIELECTROPHORESIS EFFECTS; ELECTROMANIPULATORS;

LASER ABLATION;

EID: 0032225953     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.309510     Document Type: Conference Paper

References (5)

1. Electro manipulation and separation of cells using travelling electro fields
2. Excimer laser patterning of thick and thin films for high-density packaging
3. Fabrication techniques and their application to produce novel micromachined structures and devices using excimer laser projection
4. Multishot ablation of polymer and metal films at 248 nm
5. Ultraviolet laser ablation of polyimide films