Automatic defect classification: status and industry trends

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2439, Issue , 1995, Pages 210-220

  Bennett, Marylyn H ^a   Tobin Jr , Kenneth W ^a   Gleason, Shaun S ^a  

^a TEXAS INSTRUMENTS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEFECTS; INSPECTION; LITHOGRAPHY;

AUTOMATIC DEFECT CLASSIFICATION; MICROCONTAMINATION;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0029426397     PISSN: 0277786X     EISSN: None     Source Type: None    
DOI: 10.1117/12.209203     Document Type: Conference Paper

References (11)