Integrated micro-electro-mechanical sensor development for inertial applications

IEEE Aerospace and Electronic Systems Magazine

Volumn 13, Issue 11, 1998, Pages 36-40

  Allen, J J ^a,d   Kinney, R D ^a,d   Sarsfield, J ^a,d   Daily, M R ^a,d   Ellis, J R ^a,d   Smith, J H ^a,d   Montague, S ^a,d   Howe, R T ^b,e   Boser, B E ^b,e   Horowitz, R ^b,e   Pisano, A P ^b,e   Lemkin, M A ^c,f   Clark, W A ^c,f   Juneau, T ^c,f  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c Integrated Micro Instruments ^*  (United States)

^d SANDIA NATIONAL LABORATORIES   (United States)

^e UNIVERSITY OF CALIFORNIA   (United States)

^f Integrated Micro Instruments   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; INERTIAL NAVIGATION SYSTEMS; MICROELECTROMECHANICAL DEVICES; MONOLITHIC INTEGRATED CIRCUITS;

INTEGRATED MICROELECTROMECHANICAL SENSORS;

MICROSENSORS;

EID: 0032206391     PISSN: 08858985     EISSN: None     Source Type: Journal    
DOI: 10.1109/62.730622     Document Type: Article

References (13)

1. W. Kuehnel and S. Sherman, 1994, A Surface Micromachined Silicon Accelerometer with On-Chip Detection Circuitry, Sensors and Actuators A, vol. 45, no. 1, pp. 7-16.
2. W. Yun, R. Howe and P. Gray, 1992, Surface Micromachined, Digitally Force-Balanced Accelerometer with Integrated CMOS Detection Circuitry, Proc. of the IEEE Solid-State Sensor and Actuator Workshop'92, p. 126.
3. J. Smith, S. Montague, J. Sniegowski, J. Murray and P. McWhorter, 1995. Embedded Micromechanical Devices for the Monolithic Integration of MEMS with CMOS, Proc. IEDM'95, pp. 609-612.
4. J. Sniegowski and E. Garcia, 1995, Microfabricated Actuators and Their Application to Optics, SPIE Vol. 2383, pp. 46-64.
5. M. Lemkin, M. Ortiz, N. Wongkomet, B. Boser and J. Smith, 1997, A 3-Axis Surface Micromachined Sigma-Delta Accelerometer, Proc. ISSCC'97, pp. 202-203.
6. Transducers'97, June 1997.
7. W. Clark, R. Howe and R. Horowitz, September 1996, Z-Axis Vibratory Rate Gyroscope, Micromachining Workshop III: Technology and Applications.
8. T. Roessig, R. Howe, A. Pisano and J. Smith, June 1997, Surface-Micromachined Resonant Accelerometer, to be published T. Juneau, et al., Dual Axis Operation of a Micromachined Rate Gyroscope, to be presented at presented at Transducers '97.
9. T. Roessig, R. Howe, A. Pisano and J. Smith, June 1997, Surface-Micromachined Resonant Accelerometer, to be published T. Juneau, et al., Dual Axis Operation of a Micromachined Rate Gyroscope, to be presented at presented at Transducers '97.
10. B. Davies, C. Barron, S. Montague, J. Smith, J. Murray, T. Christenson and V. Bateman, March 1997, High G MEMS Integrated Accelerometer, Proc. SPIE Smart Electronics and MEMS.
11. IEEE STD 337-1992, Standard Specification Format Guide and Test Procedure for Linear, Single-Axis, Pendulous, Analog, Torque Balance Accelerometer.
12. IEEE STD 530-1978, Standard Specification Format Guide and Test Procedure for Linear, Single-Axis, Digital, Torque Balance Accelerometer.
13. J.J. Allen, et. al., April 20-23, 1998, Integrated Micro-Electro-Mechanical Sensor Development for Inertial Applications, Proceedings of the Position Location and Navigation Symposium, PLANS '98, Rancho Mirage, CA.