Mechanical processes in chemical-mechanical planarization: Plasticity effects in oxide thin films

Journal of Electronic Materials

Volumn 27, Issue 10, 1998, Pages 1107-1111

  Rajan, Krishna ^a  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

Author keywords

Brittle ductile transition; Chemical mechanical planarization (CMP); Environmentally sensitive fracture; Oxide films; Surface plasticity

Indexed keywords

BRITTLENESS; FRACTURE; OXIDES; PHASE TRANSITIONS; PLASTICITY; REMOVAL; THIN FILMS;

BRITTLE DUCTILE TRANSITION; CHEMICAL MECHANICAL PLANARIZATION; ENVIRONMENTALLY SENSITIVE FRACTURE; MECHANICAL EFFECT; SYNERGISM;

CHEMICAL POLISHING;

EID: 0032182610     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-998-0146-8     Document Type: Article

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