Initial fabrication of a micro-induction gyroscope

Microelectronic Engineering

Volumn 30, Issue 1-4, 1996, Pages 531-534

  Williams, C B ^a   Shearwood, C ^a   Mellor, P H ^a   Mattingley, A D ^a   Gibbs, M R J ^a   Yates, R B ^a  

^a UNIVERSITY OF SHEFFIELD   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; DEGREES OF FREEDOM (MECHANICS); ELECTRIC COILS; ELECTRIC CURRENTS; ELECTRIC EXCITATION; GOLD; MICROELECTRONIC PROCESSING; MICROMACHINING; ROTATION; ROTORS; SEMICONDUCTING SILICON; SUBSTRATES;

COIL EXCITATION CURRENT; ELECTROMAGNETIC INDUCTION; ELECTROSTATIC FORCE; LEVITATION; MICROINDUCTION GYROSCOPE; PLANAR COIL;

GYROSCOPES;

EID: 0029779789     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/0167-9317(95)00302-9     Document Type: Article

References (7)

1. J. Söderkvist, 'Micromachined gyroscopes', Sensors and Actuators A 43, 65 (1994).
2. British Patent Application No.: 9507184.
3. C. Shearwood, C.B. Williams, P.H. Mellor, R.B. Yates, M.R.J. Gibbs, and A.D. Mattingley, 'Levitation of a micromachined rotor for application in a rotating gyroscope', Electronics Letters 31, 1845 (1995).
4. W. Lawrenz, 'Automotive electronics: state of the art and future perspectives', Microprocessors and Microsystems 13, 235 (1989).
5. MEGA Finite Element Package, Bath University.
6. A.D. Mattingley, C. Shearwood, and M.R.J Gibbs, 'Magnetic and magnetoelastic properties of amorphous FeSiBC films', IEEE Trans. Magn. 30, 4806 (1994).
7. M. Yamaguchi, S. Arakawa, S. Yabukami, and K.I. Arai, 'Estimation of the in-situ permeabilities in thin film inductors', IEEE Trans Magn. 29, 3210 (1993).