Diamond films: Recent developments in theory and practice

MRS Bulletin

Volumn 23, Issue 9, 1998, Pages 28-31

  Stoneham, A M ^a   Ford, I J ^a   Chalker, P R ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DOPING (ADDITIVES); ELECTRIC CONDUCTIVITY OF SOLIDS; ELECTRON EMISSION; FILM GROWTH; FRICTION; GAS ADSORPTION; MATHEMATICAL MODELS; NUCLEATION; POLYCRYSTALLINE MATERIALS; SURFACE PHENOMENA; WEAR OF MATERIALS;

EFFECTIVE MEDIUM THEORY; ELASTICITY THEORY;

DIAMOND FILMS;

EID: 0032163884     PISSN: 08837694     EISSN: None     Source Type: Journal    
DOI: 10.1557/S0883769400029328     Document Type: Article

References (27)

1. For example, see A.M. Stoneham in The Properties of Natural and Synthetic Diamond, edited by J.E. Field (Academic Press, London, 1992) p. 3 for broad review of diamond theory.
2. Z.Q. Wang, D. Stroud, and S.A. Dregia, Phys. Rev. B 50 (1994) p. 12073.
3. J. Hartmann, M. Costello, and M. Reichling, Phys. Rev. Lett. 80 (1998) p. 117.
4. P.K. Bachmann and R. Messier, Chem. Eng. News 67 (1989) p. 24.
5. P. Joeris, C. Benndorf,and R. Kroeger, Surf. Coat. Technol. 59 (1993) p. 310.
6. C.F. Chen, C.L. Lin, and T.M. Hong, ibid. 52 (1992) p. 205; C.E. Johnson and W.A. Weimer, J. Mater. Res. 8 (1993) p. 2245.
7. C.F. Chen, C.L. Lin, and T.M. Hong, ibid. 52 (1992) p. 205; C.E. Johnson and W.A. Weimer, J. Mater. Res. 8 (1993) p. 2245.
8. T.I. Hukka, R.E. Rawles, and M.P. D'Evelyn, in Chemical Perspectives of Microelectronic Materials III, edited by C.R. Abernathy, C.W. Bates, D.A. Bohling, and W.S. Hobson (Mater. Res. Soc. Symp. 282, Pittsburgh, 1993) p. 671.
9. L. Thomas, M.J. Cinelli, J.L. Jauberteau, J. Aubreton, and A. Catherinot, Diamond Rel. Mater. 3 (1994) p. 560.
10. P.K. Bachmann, D. Leers, and H. Lydtin, ibid. 1 (1991) p. 1.
11. R.J. Kee, P.M. Rupley, and J.A. Miller, The CHEMKIN Thermodynamic Database, Sandia Report No. 87-8215 UC-4 (Sandia National Laboratories, Livermore, CA, 1987).
12. R. Beckmann, B. Sobisch, and W. Kulisch, Diamond Rel. Mater. 4 (1995) p. 256.
13. C. Wild, R. Kohl, N. Herres, W. MüllerSebert, and P. Koidl, ibid. 3 (1994) p. 373.
14. I.J. Ford, J. Appl. Phys. 78 (1995) p. 510; J. Phys. D 29 (1996) p. 2229.
15. I.J. Ford, J. Appl. Phys. 78 (1995) p. 510; J. Phys. D 29 (1996) p. 2229.
16. C. Battaile, D.J. Srolovitz, and J.E. Butler, Diamond Rel. Mater. 6 (1997) p. 1198.
17. S. Matsumoto, Y. Sato, M.T. Tsumi, and N. Setaka, J. Mater. Sci. 17 (1982) p. 3106.
18. S. Yugo, T. Kanai, T. Kimura, and T. Muto, Appl Phys. Lett. 58 (1991) p. 1036.
19. S.P. McGinnis, M.A. Kelly, and S.B. Hagström, J. Mater. Res. 12 (1997) p. 3354.
20. S. Uhlmann, T. Frauenheim, and U. Stephan, Phys. Rev. B 51 (1995) p. 4541.
21. P. Mahalingam, H. Liu, and D.S. Dandy, J. Appl. Phys. 81 (1997) p. 1966.
22. K. Hayashi, S. Yamanaka, H. Watanabe, T. Sekiguchi, H. Okushi, and K. Kajimura, ibid. 81 p. 7078.
23. A.M. Stoneham, M.M.D. Ramos, and A.P. Sutton, Philos. Mag. A67 (1993) p. 797.
24. J.A. Harrison, C.T. White, R.J. Colton, and D.W. Brenner, Thin Solid Films 260 (1995) p. 205.
25. A.M. Stoneham and A.H. Harker, Wear 80 (1982) p. 377.
26. Z-H. Huang, P.H. Cutler, N.M. Miskovsky, and T.E. Sullivan, Appl. Phys. Lett. 65 (1994) p. 2652.
27. N.M. Miskovsky, P.H. Cutler, and Z-H. Huang, J. Vac. Sci. Technol. B 14 (1996) p. 2037.