12C(α,α)12C resonant elastic scattering at 5.7 MeV as a tool for carbon quantification in silicon-based heterostructures

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 143, Issue 3, 1998, Pages 357-370

  Berti, M ^a   De Salvador, D ^a   Drigo, A V ^a   Romanato, F ^a,c   Sambo, A ^a   Zerlauth, S ^b   Stangl, J ^b   Schaffler F ^b   Bauer, G ^b  

^a UNIVERSITY OF PADOVA   (Italy)

^b JOHANNES KEPLER UNIVERSITY LINZ   (Austria)

^c LABORATORIO TASC   (Italy)

Author keywords

Carbon determination; Nuclear techniques; SiGeC alloys

Indexed keywords

ENERGY GAP; RESONANCE; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SCATTERING; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; STRAIN;

RESONANT ELASTIC SCATTERING;

HETEROJUNCTIONS;

EID: 0032163633     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(98)00323-1     Document Type: Article

References (26)

1. S. Furukawa, H. Etoh, A. Ishizaka, T. Shimada, Semiconductor with crystalline silicon-germanium-carbon alloy, US Patent #4.885.614, Dec 5, 1989.
2. H.J. Osten, E. Bugiel, P. Zaumseil, Appl. Phys. Lett 64 (1994) 3440.
3. G. Davies, R.C. Newman, in: T.S. Moss (Ed.), Handbook of Semiconductors, vol. 3, Elsevier Science, New York, 1994.
4. K. Eberl, S.S. Iyer, J.C. Tsang, M.S. Goorsky, F.K. LeGoues, J. Vac. Sci. Tech. B 10 (1992) 934.
5. K. Eberl, S.S. Iyer, S. Zollner, J.C. Tsang, F.K. LeGoues, Appl. Phys. Lett 60 (1992) 3033.
6. J.W. Strane, H.J. Stein, S.R. Lee, S.T. Picraux, J.K. Watanabe, J.W. Mayer, J. Appl. Phys. 76 (1994) 3656.
7. R.G. Wilson, F.A. Stevie, Ch.W. Magee, Secondary Ion Mass Spectrometry, Wiley, New York, 1989.
8. M. Östling, C.S. Petersson, G. Possnert, Nucl. Instr. and Meth. 218 (1983) 439.
9. J.A. Leavitt, L.C. McIntyre, Jr., P. Stoss, J.G. Oder, M.D. Ashbaugh, B. Dezfouly-Arjomandy, Z.M. Yang, Z. Lin, Nucl. Instr. and Meth. B 40-41 (1989) 776.
10. Y. Feng, Z. Zhou, Y. Zhou, G. Zhao, Nucl. Instr. and Meth. B 86 (1994) 225.
11. J.A. Leavitt, L.C. McIntyre, Jr., M.D. Ashbaugh, R.P. Cox, Z. Lin, R.B. Gregory, Nucl. Instr. and Meth. B 118 (1996) 613.
12. A.E. Bair, Z. Atzmon, S.W. Russel, J.C. Barbour, T.L. Alford, J.W. Mayer, Nucl. Instr. and Meth. B 118 (1996) 274.
13. B. Maurel, G. Amsel, J.P. Nadai, Nucl. Instr. and Meth. 197 (1982) 1.
14. L. Vegard, Z. Phys. 5 (1921) 17.
15. J.P. Dismukes, L. Ekstrom, R.J. Paff, J. Phys. Chem. 68 (1964) 3021.
16. M. Melendez-Lira, J. Menendez, W. Windl, O.F. Sankey, G.S. Spencer, S. Sego, R.B. Culbertson, A.E. Bair, T.L. Alford, Phys. Rev. B 54 (1996) 12866.
17. P.C. Kelires, Phys. Rev. B 55 (1997) 8784.
18. S. Hao, C.H. Sheng, T. Jia-yong, Y. Fujia, Acta Phys. Sinica 43 (1994) 1569.
19. J.R. Tesmer, M. Nastasi (Eds.), Handbook of Modern Ion Beam Materials Analysis, Materials Research Society, Pittsburgh USA, 1995.
20. C. Cohen, J.A. Davies, A.V. Drigo, T.E. Jackman, Nucl. Instr. and Meth. 218 (1983) 147.
21. S. Zerlauth, C. Penn, H. Seyringer, F. Schäffler, Appl. Phys. Lett. 72 (13) (1998) 1602.
22. A. Armigliato, M. Servidori, F. Cembali, R. Fabbri, R. Rosa, F. Corticelli, D. Govoni, A.V. Drigo, M. Mazzer, F. Romanato, S. Frabboni, R. Balboni, S.S. Iyer, A. Guerrieri, Microsc. Microanal. Microstruct. 3 (1992) 363.
23. J. L'Ecuyer, J.A. Davies, N. Matsunami, Nucl. Instr. and Meth. 160 (1979) 337.
24. H.H. Andersen, F. Besenbacher, P. Loftager, W. Möller, Phys. Rev A 21 (1980) 1891.
25. J.F. Ziegler, Stopping Power and Ranges of Ions in Matter, vol. 4, Pergamon Press, New York, 1977.
26. C.H. Sheng, S. Hao, Y. Fujia, T. Jia-yong, Nucl. Instr. and Meth. B 85 (1994) 47.