Ion-beam analysis of silicon carbide

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 118, Issue 1-4, 1996, Pages 613-616

  Leavitt, J A ^a   McIntyre Jr , L C ^a   Ashbaugh, M D ^a   Cox, R P ^a   Lin, Z ^a   Gregory, R B ^b  

^a University of Arizona   (United States)

^b MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; ANNEALING; BACKSCATTERING; CHEMICAL VAPOR DEPOSITION; FILMS; HYDROGEN; ION BEAMS; METHANE; PLASMA APPLICATIONS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; STOICHIOMETRY; SUBSTRATES;

CHANNEL; CHANNELING; ION BEAM ANALYSIS; STOICHIOMETRIC RATIO;

SILICON CARBIDE;

EID: 0030565095     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-583X(95)01462-4     Document Type: Article

References (12)

1. K. Yasui, A. Fujita and T. Akahane, Jpn. J. Appl. Phys. 31 (1992) L379; G. Chen, F. Zhang and S. Yan, J. Non-Cryst. Solids 137/138 (1991) 1263.
2. K. Yasui, A. Fujita and T. Akahane, Jpn. J. Appl. Phys. 31 (1992) L379; G. Chen, F. Zhang and S. Yan, J. Non-Cryst. Solids 137/138 (1991) 1263.
3. J.A. Leavitt, Nucl. Instr. and Meth. B 24/25 (1987) 717.
4. L.R. Doolittle, Nucl. Instr. and Meth. B 15 (1986) 227.
5. J.A. Leavitt, L.C. McIntyre, Jr. and M.R. Weller, in: Handbook of Modern Ion Beam Materials Analysis, eds. J.R. Tesmer, M. Nastasi, C.J. Maggiore, J.C. Barbour and J.W. Mayer, Materials Research Society, Pittsburgh, PA (1995), chap. 4.
6. M. Ostling and C.S. Peterson, Nucl. Instr. and Meth. 218 (1983) 439.
7. S.H. Sie, D.R. McKenzie, G.B. Smith and C.G. Ryan, Nucl. Instr. and Meth. B 15 (1986) 632.
8. G. Vizkelethy, P. Revesz, J.W. Mayer and Jian Li, Surf, and Interf. Anal. 20 (1993) 309.
9. J.A. Leavitt, L.C. McIntyre, Jr., P. Stoss, J.G. Oder, M.D. Ashbaugh, B. Dezfouly-Arjomandy, Z.M. Yang and Z. Lin, Nucl. Instr. and Meth. B 40/41 (1989) 776.
10. M.K. Leung, Ph.D. dissertation, Univ. of Kentucky (1972).
11. R.P. Cox, J.A. Leavitt and L.C. McIntyre, Jr., in: Handbook of Modern Ion Beam Materials Analysis, eds. J.R. Tesmer, M. Nastasi, C.J. Maggiore, J.C. Barbour and J.W. Mayer, Materials Research Society, Pittsburgh, PA (1995), Appendix 7, Fig. A7.85.
12. B.L. Doyle and P.S. Peercy, Appl. Phys. Lett. 34 (1979) 811.