Comparison of elastic resonance and elastic recoil detection in the quantification of carbon in SiGeC

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 118, Issue 1-4, 1996, Pages 274-277

  Bair, A E ^a   Atzmon, Z ^a   Russell, S W ^a   Barbour, J C ^b   Alford, T L ^a   Mayer, J W ^a  

^a ARIZONA STATE UNIVERSITY   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; CHEMICAL VAPOR DEPOSITION; CONCENTRATION (PROCESS); FILM GROWTH; IONS; RESONANCE; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SCATTERING;

CARBON CONCENTRATIONS; CARBON SCATTERING CROSS SECTION; ELASTIC RECOIL DETECTION; ELASTIC RESONANCE REACTION; ION ANALYSIS TECHNIQUES;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 0030565154     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-583X(95)01468-3     Document Type: Article

References (10)

1. W.K. Chu, J.W. Mayer and M-A. Nicolet, Backscattering Spectrometry (Academic Press, San Diego, CA, 1978).
2. J.A. Leavitt, L.C. McIntyre, Jr., P. Stoss, J.G. Oder, M.D. Ashbaugh, B. Dezfouly-Arjomandy, Z.-M. Yang and Z. Lin, Nucl. Instr. and Meth. B 40/41 (1989) 776.
3. P. Revesz, Cornell University, private communication.
4. G. Vizkelethy, P. Revesz, J.W. Mayer and Jian Lee, Surf. and Inter. Analysis, 20 (1993) 309.
5. C. Neelmeijer, R. Grotzschel and R. Klabes, Nucl. Instr. and Meth. B 64 (1992) 461.
6. J.C. Barbour (1994) SERDAP computer program (Sandia National Laboratories, Dept. 1111, Albuquerque, NM).
7. D.M. Scott and B.M. Paine, Nucl. Instr. and Meth. 218 (1983) 154.
8. L.R. Doolittle, Nucl. Instr. and Meth. B 9 (1985) 344.
9. J.F. Zeigler, RSTOP computer code from TRIM-92 (IBM Research Center, Yorktown Heights, NY 10598).
10. J.C. Barbour and B.L. Doyle, in: Handbook of Modern Ion Beam Materials Analysis, eds. J.R. Tesmer, M. Nastasi, C.J. Maggiore, J.C. Barbour and J.W. Mayer, Materials Research Society, Pittsburgh, PA (1995) chap. 5.