Formation of polycrystalline β-FeSi2 layers by ion-implantation and their optical properties

Materials Science and Engineering: A

Volumn 253, Issue 1-2, 1998, Pages 284-291

  Kakemoto, Hirofumi ^a,b   Katsumata, Hiroshi ^a,c   Takada, Takeaki ^a,c   Tsai, Yu Shin ^d   Hasegawa, Masataka ^a   Sakuragi, Shiro ^d   Kobayashi, Naoto ^a   Makita, Yunosuke ^a   Tsukamoto, Takeyo ^b   Uekusa, Shin Ichiro ^c  

^a ELECTROTECHNICAL LABORATORY   (Japan)

^b TOKYO UNIVERSITY OF SCIENCE   (Japan)

^c MEIJI UNIVERSITY   (Japan)

^d Union Material Inc   (Japan)

Author keywords

FeSi2( ); Ion beam synthesis; Optical properties; Photoluminescence

Indexed keywords

ANNEALING; BAND STRUCTURE; CRYSTAL GROWTH; DEPOSITION; ION IMPLANTATION; OPTICAL PROPERTIES; PHOTOLUMINESCENCE; POLYCRYSTALLINE MATERIALS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SYNTHESIS (CHEMICAL); THICKNESS MEASUREMENT; X RAY DIFFRACTION ANALYSIS;

BAND GAP ENERGY; ELECTRON BEAM DEPOSITION; ION BEAM SYNTHESIS; IRON SILICIDE;

IRON ALLOYS;

EID: 0032158258     PISSN: 09215093     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0921-5093(98)00737-0     Document Type: Article

References (41)

1. E. Gro, M. Riffel, U. Stöhrer, J. Mater. Res. 10 (1995) 34; T.B. Massalski, J.L. Murray, L.H. Bennett, H. Baker, Binary Alloy Phase Diagrams, American Society for Metals, 2 (1986) 1108.
2. E. Gro, M. Riffel, U. Stöhrer, J. Mater. Res. 10 (1995) 34; T.B. Massalski, J.L. Murray, L.H. Bennett, H. Baker, Binary Alloy Phase Diagrams, American Society for Metals, 2 (1986) 1108.
3. M. Libezny, J. Poortmans, T. Vermeulen, J. Nijs, P.H. Amesz, K. Herz, M. Powalla, Proceedings of 13th European Photovoltaic Solar Energy Conference, 1995, p. 1326.
4. H. Katsumata, H.L. Shen, N. Kobayashi, Y. Makita, M. Hasegawa, H. Shibata, S. Kimura, A. Obara, S. Uekusa, Proceedings of the 9th International Conference on Ion Beam Modification of Materials, Elsevier Science, New York, 1996, p. 943.
5. E. Grosse, M. Riffel, U. Stohrer, J. Mater. Res. 10 (1995) 34.
6. Ch. Kloc, E. Arushanov, M. Wendl, H. Hohl, U. Malang, E. Bucher, J. Alloys Comps 219 (1995) 93.
7. K.J. Reeson, M.S. Finney, M.A. Harry, S.V. Hutchinson, Y.S. Tan, D. Leong, T.R. Bearda, Z. Yang, G. Curello, K.P. Homewood, R.M. Gwilliam, B.J. Sealy, Nucl. Instrum. Methods B 106 (1995) 364.
8. H. Katsumata, Y. Makita, N. Kobayashi, H. Shibata, M. Hasegawa, I. Aksenov, S. Kimura, A. Obara, S. Uekusa, J. Appl. Phys. 80 (1996) 5955.
9. H. Katsumata, Y. Makita, N. Kobayashi, H. Shibata, M. Hasegawa, S. Uekusa, Jpn. J. Appl. Phys. 36 (1997) 2802.
10. D.N. Leong, M.A. Harry, K.J. Reeson, K.P. Homewood, Appl. Phys. Lett. 68 (1996) 1649.
11. M. Powalla, K. Herz, Appl. Surf. Sci. 65/66 (1993) 482.
12. A.H. Reader, J.P.W.B. Duchateau, J. Timmers, F.J.G. Hakkens, Appl. Surf. Sci. 73 (1993) 131.
13. J.L. Regolini, F. Trincat, I. Berbezier, Y. Shapira, Appl. Phys. Lett. 60 (1992) 956.
14. J.Y. Natoli, I. Berbezier, J. Derrien, Appl. Phys. Lett. 65 (1994) 1439.
15. S. Mantl, Nucl. Instrum. Methods B 80/81 (1993) 895; C. Fu, M. Krijin, S. Doniach, Phys. Rev. B49 (1994) 2219.
16. S. Mantl, Nucl. Instrum. Methods B 80/81 (1993) 895; C. Fu, M. Krijin, S. Doniach, Phys. Rev. B49 (1994) 2219.
17. G. Martin, P. Bellon, MRS Bull. 16 (1991) 33.
18. H. Kakemoto, Y. Tsai, A.C. Beye, H. Katsumata, S. Sakuragi, Y. Makita, A. Obara, N. Kobayashi, H. Shibata, S. Uekusa, T. Tsukamoto, T. Tsunoda, Y. Imai, Mater. Res. Soc. Symp. Proc. 402 (1996) 331.
19. H. Shibata, Y. Makita, H. Kakemoto, Y. Tsai, S. Sakuragi, H. Katsumata, A. Obara, N. Kobayashi, S. Uekusa, T. Tsukamoto, T. Tsunoda, Y. Imai, in: Proceedings of the Fifteenth International Conference on Thermoelectrics, 26-29 March, Pasadena, CA, USA.
20. H. Kakemoto, Y. Makita, H. Katsumata, T. Iida, C. Stauter, A. Obara, H. Shibata, Y. Tsai, S. Sakuragi, N. Kobayashi, M. Hasegawa, S. Uekusa, T. Tsukamoto, in: Photonics, China, 6-7 November, SPIE 2888, Beijing, People's Republic of China 1996, p. 32.
21. H. Kakemoto, Y. Makita, A. Obara, Y. Tsai, S. Sakuragi, S. Ando, T. Tsukamoto, Mat. Res. Soc. Symp. Proc. 478 (1997) 273.
22. H. Katsumata, Y. Makita, N. Kobayashi, M. Hasegawa, H. Shibata, H. Takahashi, I. Aksenov, A. Obara, S. Kimura, J. Tanabe, S. Uekusa, The Seventh International Symposium on Advanced Nuclear Energy Research, 18-20 March, Takasaki, Japan.
23. T. Takada, H. Katsumata, Y. Makita, N. Kobayashi, M. Hasegawa, S. Uekusa, Mater. Res. Soc. Symp. Proc. 478 (1997) 267-272.
24. J. Derrien, J. Chevrier, V. Le Thanh, J.E. Mahan, Appl. Surf. Sci. 56 (1993) 382.
25. K. Lefki, P. Muret, E. Bustarret, N. Boutarek, R. Madar, J. Chevrier, J. Derrien, M. Brunel, Solid State Commun. 80 (1991) 791.
26. C.A. Dimitrdis, J.H. Werner, S. Logothetidis, M. Stutzmann, J. Weber, R. Nesper, J. Appl. Phys. 68 (1990) 1726.
27. A. Rizzi, B.N.E. Rösen, D. Freundt, Ch. Dicker, H. Lüthm, Phys. Rev. B51 (1995) 17780.
28. N.E. Christensen, Phys. Rev. B42 (1990) 7148.
29. C. Giannini, S. Lagomarsino, F. Scarinci, P. Castrucci, Phys. Rev. B45 (1992) 8822.
30. A. Rizzi, B.N.E. Rösen, D. Freundt, C. Dicker, H. Lüth, D. Gerthsen, Phys. Rev. B51 (1995) 17780.
31. J.J. Pankove, Optical Process in Semiconductors, Dover, New York, 1971, p. 34.
32. M.C. Bost, J.E. Mahan, J. Appl. Phys. 64 (1988) 2034.
33. F. Urbach, Phys. Rev. 92 (1953) 1324.
34. G.D. Cody, T. Tiedje, B. Abeles, B. Brooks, Y. Goldstein, Phys. Rev. Lett. 47 (1981) 1480.
35. Z. Yang, K.P. Homewood, M.S. Finney, M.A. Harry, K.J. Reeson, J. Appl. Phys. 78 (1995) 1958.
36. Z. Yang, K.P. Homewood, J. Appl. Phys. 79 (1996) 4312.
37. U. Zammit, K.N. Madhusoodanan, M. Marinelli, F. Scudieri, R. Pizzoferrato, F. Mercuri, E. Wendler, W. Wesch, Phys. Rev. B49 (1994) 14322.
38. P.J. Dean, J.R. Haynes, W.F. Wood, Phys. Rev. 161 (1967) 711.
39. 1992 Annual Book of ASTM Standards, American Society for Testing and Material, Philadelphia, 10.05, 1992, F1389-92, p. 682.
40. A.C.T. Drakeford, E.C. Lightowlers, Mater. Res. Soc. Symp. Proc. 104 (1988) 209.
41. K. Radermacher, R. Carius, S. Mantl, Nucl. Instr. Methods B 84 (1994) 163.