Performance evaluation of an IC fabrication system using Petri nets

Proceedings of the IEEE International Conference on Systems, Man and Cybernetics

Volumn 1, Issue , 1997, Pages 269-274

  Jeng, Mu Der ^a   Chou, Shih Wei ^a   Chung, Chi Liang ^a  

^a NATIONAL TAIWAN OCEAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ETCHING; FLEXIBLE MANUFACTURING SYSTEMS; PETRI NETS; PROCESS CONTROL; RANDOM ACCESS STORAGE;

PERFORMANCE EVALUATION;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0031352386     PISSN: 08843627     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)