Modeling and analysis of the photo area in an IC manufacturing system

Proceedings of the IEEE International Conference on Systems, Man and Cybernetics

Volumn 4, Issue , 1996, Pages 2973-2977

  Jeng, Mu Der ^a   Feng, Chengche ^a   Chou, Shih Wei ^a  

^a NATIONAL TAIWAN OCEAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CALCULATIONS; COMPUTER SIMULATION; DATA ACQUISITION; MATHEMATICAL MODELS; PERFORMANCE; PETRI NETS; RANDOM PROCESSES; SENSITIVITY ANALYSIS; SPECIFICATIONS; SYSTEMS ANALYSIS;

GENERALIZED STOCHASTIC PETRI NETS; PHOTO AREA; TIME DELAYS;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0030380422     PISSN: 08843627     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)