A new process for the fabrication of miniature Fabry Perot spectrometers

Mechatronics

Volumn 8, Issue 5, 1998, Pages 485-504

  Zavracky, Paul M ^a   Hennenberg, Erwin ^a   Denis, Kevin ^a   Xi, Huikai ^a  

^a Northeastern University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROMACHINING; MIRRORS; OPTICAL COATINGS; SILICON;

MINIATURE FABRY PEROT SPECTROMETERS; SILICON MICROFABRICATION;

SPECTROMETERS;

EID: 0032139168     PISSN: 09574158     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0957-4158(98)00019-1     Document Type: Article

References (10)

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