Comparative study of the interface roughness of Ag/Au and Cu/Au multilayers with scanning tunneling microscopy and x-ray diffraction

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 2, 1996, Pages 1121-1125

  Heyvaert, I ^a   Temst, K ^a   Van Haesendonck, C ^a   Bruynseraede, Y ^a  

^a UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0004214662     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588412     Document Type: Review

References (11)

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