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Diamond and Related Materials

Volumn 7, Issue 8, 1998, Pages 1227-1232

Submicrocrystalline diamond film deposited by CVD of Freon 22: Fabrication of pressure sensing devices

(4) Chakrabarti, K a Chakrabarti, R a Chaudhuri, S a Pal, A K a

a DEPARTMENT OF MATERIALS SCIENCE (India)

Author keywords

Chemical vapour deposition; Diamond film; Pressure sensor; Stress

Indexed keywords

CHEMICAL VAPOR DEPOSITION; FREONS; PRESSURE CONTROL; SCHOTTKY BARRIER DIODES; SILICON WAFERS; THIN FILMS;

PRESSURE SENSORS;

DIAMOND FILMS;

EID: 0032136464 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/s0925-9635(98)00187-3 Document Type: Article

Times cited : (5)

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