Design and modeling of rapid thermal processing systems

IEEE Transactions on Semiconductor Manufacturing

Volumn 11, Issue 3, 1998, Pages 442-457

  Stuber, John Douglas ^a   Trachtenberg, Isaac ^b   Edgar, Thomas F ^b  

^a TEXAS INSTRUMENTS   (United States)

^b UNIVERSITY OF TEXAS AT AUSTIN   (United States)

Author keywords

Equipment control; Equipment models; Heat transfer models; Rapid thermanl processing; Temperature control

Indexed keywords

CONTROL SYSTEM ANALYSIS; DIFFERENTIAL EQUATIONS; HEAT TRANSFER; INTEGRATED CIRCUIT MANUFACTURE; MATHEMATICAL MODELS; PROCESS CONTROL; TEMPERATURE CONTROL;

RAPID THERMAL PROCESSING (RTP);

MICROELECTRONIC PROCESSING;

EID: 0032136381     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/66.705379     Document Type: Article

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