Irradiation effects of O2 cluster ions for lead oxide film formation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 121, Issue 1-4, 1997, Pages 166-169

  Akizuki, M ^a,b   Matsuo, J ^a   Shin, I ^a   Harada, M ^b   Ogasawara, S ^b   Doi, A ^b   Yamada, I ^a  

^a KYOTO UNIVERSITY   (Japan)

^b SANYO ELECTRIC CO LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; CRYSTALLIZATION; FILMS; MOLECULES; OXIDATION; OXIDES; OXYGEN; SILICON; SUBSTRATES;

LEAD OXIDES;

LEAD COMPOUNDS;

EID: 0031546239     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(96)00380-1     Document Type: Article

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