Quantitative secondary ion mass spectrometry of fluorocarbon polymers

Surface Science

Volumn 250, Issue 1-3, 1991, Pages 112-122

  Lorenz, M R ^a   Novotny, V J ^a   Deline, V R ^a  

^a IBM ALMADEN RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION--MATHEMATICAL MODELS; FILMS--THICKNESS MEASUREMENT; LUBRICANTS--ADSORPTION; MASS SPECTROMETRY--APPLICATIONS; POLYETHERS--ADSORPTION;

FLUOROCARBON FILM THICKNESS MEASUREMENT; FLUOROCARBON POLYMER ADSORPTION; POLYPERFLUOROETHER LUBRICANT FILMS; SECONDARY ION MASS SPECTROMETRY;

FLUORINE CONTAINING POLYMERS;

EID: 0026413911     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/0039-6028(91)90714-4     Document Type: Article

References (10)

1. Purity and thickness analysis of fluoropolymers by static secondary ion mass spectrometry
2. Determination of lubricant film thickness on a particulate disk surface by atomic force microscopy