Purity and thickness analysis of fluoropolymers by static secondary ion mass spectrometry

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 8, Issue 3, 1990, Pages 2388-2392

  Viswanathan, K V ^b  

^a PERKINELMER INC   (United States)

^b IBM   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000777255     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.576703     Document Type: Article

References (5)

1. A. Benninghoven, Secondary Ion Mass Spectrometry, SIMS IV, edited by A. Benninghoven, J. Okano, R. Shimizu, and W. H. Werner (Springer, New York, 1984), p. 342.
2. D. Briggs, Surf. Interface Anal. 9, 391 (1986).
3. J. A. Gardella, Jr. and D. M. Hercules, Anal. Chem. 52, 226 (1980).
4. J. W. Coburn and H. F. Winters, J. Appl. Phys. 60, 3309 (1986).
5. D. G. Welkie and R. L. Gerlaeh, Secondary Ion Mass Spectrometry, SIMS IV, edited by A. Benninghoven, J. Okano, R. Shimizu, and W. H. Werner (Springer, New York, 1984), p. 317.