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Volumn 4, Issue 4, 1998, Pages 125-129

Deposition of Cubic Boron Nitride in Hydrogen Plasma

(8) Konyashin, Igor a Inkson, Beverley a Bill, Joachim a Aldinger, Fritz a Khvostov, Valery b Bregadze, Alexey b Guseva, Malvina b Babaev, Vladimir b

a UNIVERSITY OF STUTTGART (Germany)

b MOSCOW STATE UNIVERSITY (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

CUBIC BORON NITRIDE; DECOMPOSITION; ETCHING; HYDROGEN; PLASMA APPLICATIONS;

PLASMA ASSISTED CHEMICAL VAPOR DEPOSITION;

CHEMICAL VAPOR DEPOSITION;

EID: 0032115975 PISSN: 09481907 EISSN: None Source Type: Journal
DOI: 10.1002/(sici)1521-3862(199807)04:04<125::aid-cvde125>3.3.co;2-q Document Type: Article

Times cited : (9)

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