Simulation of Micro Electro Mechanical Systems using a hybrid BEM/FEM code with the application to the stability analysis of a tunable oscillator

American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC

Volumn 57-2, Issue , 1995, Pages 931-940

  Adams, S G ^a   Hui, C Y ^a   MacDonald, N C ^a  

^a Department of Obstetrics Gynecology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; BOUNDARY ELEMENT METHOD; COMPUTER SIMULATION; COMPUTER SOFTWARE; ELECTRIC FIELD EFFECTS; ELECTROSTATICS; FINITE ELEMENT METHOD; NATURAL FREQUENCIES; OSCILLATORS (ELECTRONIC); SYSTEM STABILITY;

DYNAMIC ANALYSIS; SOFTWARE PACKAGE MATLAB; STABILITY ANALYSIS; STATIC ANALYSIS;

MICROELECTROMECHANICAL DEVICES;

EID: 0029424782     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)