A study of a high-pressure micropump for integrated chemical analysing systems

Sensors and Actuators: A. Physical

Volumn 32, Issue 1-3, 1992, Pages 335-339

  Shoji, Shuichi ^a   Esashi, Masayoshi ^a   van der Schoot, Bart ^b   de Rooij, Nico ^b  

^a TOHOKU UNIVERSITY   (Japan)

^b UNIVERSITY OF NEUCHÂTEL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL ANALYSIS - SENSORS; PUMPS - DIAPHRAGMS; PUMPS - FABRICATION; PUMPS - VALVES; VALVES AND VALVE GEAR - STRUCTURE;

FLOW INJECTION ANALYSIS; FORWARD TO REVERSE FLOW RATIO; HIGH PRESSURE MICROPUMP; LIQUID CHROMATOGRAPHY; MICRO CHECK VALVE; REVERSE FLOW RESISTANCE;

PUMPS;

EID: 0026850547     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(92)80008-Q     Document Type: Article

References (9)

1. A piezoelectric micropump based on micromachining of silicon
2. A thermopneumatic micropump based on microengineering techniques
3. Micropump and sample-injector for integrated chemical analysing systems
4. Electrohydrodynamic pumping and flow measurement
5. Smallest dead volume microvalves for integrated chemical analyzing systems
6. Integrated chemical analysing systems realizing very small sample volume
7. A flow injection analysis system with glass-bonded ISFETs for the simultaneous detection of calcium and potassium ions and pH
8. Design of an open-tubular column liquid chromatograph using silicon chip technology
9. A silicon self-aligned non-reverse valve