Spectroscopic diagnostics and modelling of silane microwave plasmas

Plasma Physics and Controlled Fusion

Volumn 40, Issue 6, 1998, Pages 1035-1056

  Fantz, U ^a,b  

^a UNIVERSITY OF STUTTGART   (Germany)

^b UNIVERSITY OF AUGSBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; DISSOCIATION; ELECTRON DENSITY MEASUREMENT; EMISSION SPECTROSCOPY; HELIUM; HYDROGEN; MICROWAVES; PLASMA COLLISION PROCESSES; PLASMA DENSITY; SILANES;

PENNING REACTIONS; PLASMA ELECTRON DENSITY; PLASMA ELECTRON TEMPERATURE; SILANE MICROWAVE PLASMAS;

PLASMAS;

EID: 0032095113     PISSN: 07413335     EISSN: None     Source Type: Journal    
DOI: 10.1088/0741-3335/40/6/011     Document Type: Article

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