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Volumn 441, Issue , 1997, Pages 475-480
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MicroRaman spectroscopy and X-ray diffraction studies of Ti-W-O thin films
a a a a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
ANNEALING;
COMPOSITION EFFECTS;
CRYSTAL LATTICES;
CRYSTAL MICROSTRUCTURE;
HIGH TEMPERATURE EFFECTS;
MORPHOLOGY;
PHASE TRANSITIONS;
RAMAN SPECTROSCOPY;
SCANNING ELECTRON MICROSCOPY;
SPUTTERING;
TITANIUM COMPOUNDS;
X RAY CRYSTALLOGRAPHY;
MICRO RAMAN SPECTROSCOPY;
THIN FILMS;
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EID: 0030653290
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (3)
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References (11)
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