Arsenic desorption kinetics from Si(100)

Surface Science

Volumn 405, Issue 2-3, 1998, Pages 228-237

  Ott, A K ^a   Casey, S M ^a   Leone, S R ^a  

^a UNIVERSITY OF COLORADO   (United States)

Author keywords

Arsenic; Desorption; Ionization mass spectroscopy; Laser single photon; Scattering; Silicon

Indexed keywords

ARSENIC; ATOMS; IONIZATION; MASS SPECTROMETRY; MOLECULES; REACTION KINETICS; SEMICONDUCTING SILICON; SURFACE PHENOMENA; THERMAL EFFECTS;

DESORPTION KINETICS; IONIZATION MASS SPECTROSCOPY; SINGLE PHOTON IONIZATION TIME OF FLIGHT MASS SPECTROMETRY;

DESORPTION;

EID: 0032073359     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0039-6028(98)00063-6     Document Type: Article

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