Epitaxial growth of barium titanate thin films at low temperatures by low-energy positive oxygen ion assistance

Solid State Ionics

Volumn 108, Issue 1-4, 1998, Pages 91-97

  Ishibashi, Yurika ^a   Tsurumi, Takaaki ^a   Ohashi, Naoki ^a   Fukunaga, Osamu ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Barium titanate; Ion bombardment; Molecular beam epitaxy; Oxygen ion

Indexed keywords

CRYSTALLIZATION; ELECTRON CYCLOTRON RESONANCE; ION BOMBARDMENT; LOW TEMPERATURE EFFECTS; METALLIC FILMS; MOLECULAR BEAM EPITAXY; OXYGEN; SUBSTRATES; THIN FILMS;

BARIUM TITANATE THIN FILMS;

BARIUM TITANATE;

EID: 0032072043     PISSN: 01672738     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0167-2738(98)00024-1     Document Type: Article

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