Thermal stability of Ti/Pt/Au ohmic contacts on InAs/graded InGaAs layers

Solid-State Electronics

Volumn 42, Issue 5, 1998, Pages 871-875

  Lee, Ching Ting ^a   Jaw, Kou Liang ^a   Tsai, Chang Da ^a  

^a NATIONAL CENTRAL UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; DIFFUSION IN SOLIDS; GOLD; METALLIZING; OHMIC CONTACTS; PLATINUM; RAPID THERMAL ANNEALING; SEMICONDUCTING INDIUM GALLIUM ARSENIDE; THERMAL EFFECTS; THERMODYNAMIC STABILITY; TITANIUM;

INDIUM ARSENIDE;

HETEROJUNCTIONS;

EID: 0032068974     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0038-1101(98)00086-0     Document Type: Article

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