Finite-element modeling of nanoindentation for determining the mechanical properties of implanted layers and thin films

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 127-128, Issue , 1997, Pages 935-939

  Knapp, J A ^a   Follstaedt, D M ^a   Barbour, J C ^a   Myers, S M ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC MODULI; FINITE ELEMENT METHOD; HARDNESS; MATHEMATICAL MODELS; MULTILAYERS; SUBSTRATES; THIN FILMS; YIELD STRESS;

NANOINDENTATION TESTING; PLASMA DEPOSITION;

ION IMPLANTATION;

EID: 0031547942     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00034-7     Document Type: Article

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