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Applied Physics A: Materials Science and Processing

Volumn 66, Issue 4, 1998, Pages 423-433

Structural stability of heat-treated CoN/CN soft X-ray multilayers fabricated by dual-facing-target sputtering

(4) Bai, H L a Jiang, E Y a Wang, C D a Tian, R Y a

a TIANJIN UNIVERSITY (China)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; ANNEALING; CARBON INORGANIC COMPOUNDS; CHEMICAL BONDS; COBALT COMPOUNDS; CRYSTAL ATOMIC STRUCTURE; DOPING (ADDITIVES); INTERDIFFUSION (SOLIDS); NITRIDES; NITROGEN; SPUTTERING; THERMODYNAMIC STABILITY;

CARBON NITRIDE; COBALT NITRIDE; DUAL FACING TARGET SPUTTERING;

MULTILAYERS;

EID: 0032046311 PISSN: 09478396 EISSN: None Source Type: Journal
DOI: 10.1007/s003390050689 Document Type: Article

Times cited : (8)

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