Interdiffusion in Co/C soft X-ray multilayer mirrors

Thin Solid Films

Volumn 286, Issue 1-2, 1996, Pages 176-183

  Bai, H L ^a   Jiang, E Y ^a   Wang, C D ^a  

^a TIANJIN UNIVERSITY   (China)

Author keywords

Diffusion; Heat treatment; Multilayers; X ray diffraction

Indexed keywords

AMORPHOUS FILMS; ANNEALING; CARBON; COBALT; ENTHALPY; MATHEMATICAL MODELS; SPUTTERING; X RAY DIFFRACTION ANALYSIS;

DUAL-FACING-TARGET SPUTTERING; ENTHALPY OF MIXING; INTERDIFFUSION COEFFICIENTS; MACROSCOPIC ATOM MODEL; MULTILAYERS;

INTERDIFFUSION (SOLIDS);

EID: 0030235509     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)08540-9     Document Type: Article

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