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Applied Physics A: Materials Science and Processing

Volumn 63, Issue 1, 1996, Pages 57-65

Structural stability of heat-treated Co/C soft X-ray multilayers fabricated by dual-facing-target sputtering

(3) Bai, H L a Jiang, E Y a Wang, C D a

a TIANJIN UNIVERSITY (China)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLIZATION; HEAT TREATMENT; INTERFACES (MATERIALS); MICROSTRUCTURE; RAMAN SPECTROSCOPY; SPUTTERING; STRUCTURE (COMPOSITION); THERMAL EXPANSION; THERMODYNAMIC STABILITY; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

COBALT CARBON SOFT X RAY MULTILAYERS; DUAL FACING TARGET SPUTTERING; GRAZING INCIDENCE; REFLECTIVITY CHANGE; STRUCTURAL STABILITY; X RAY INCIDENT FLUX;

MULTILAYERS;

EID: 0030193727 PISSN: 09478396 EISSN: None Source Type: Journal
DOI: 10.1007/BF01579746 Document Type: Article

Times cited : (15)

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