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Volumn 83, Issue 6, 1998, Pages 2994-3000

Modelling of kinetics of creation and passivation of interface traps in metal-oxide-semiconductor transistors during postirradiation annealing

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; INTERFACES (MATERIALS); MOSFET DEVICES; NUMERICAL ANALYSIS; PASSIVATION; REACTION KINETICS;

EID: 0032027260     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.367055     Document Type: Article
Times cited : (31)

References (43)
  • 3
    • 0008990822 scopus 로고
    • edited by C. R. Helms and B. E. Deal Plenum, New York
    • 2 Interface, edited by C. R. Helms and B. E. Deal (Plenum, New York, 1993), p 489.
    • (1993) 2 Interface , pp. 489
    • Stahlbush, R.E.1    Edwards, A.H.2
  • 28
    • 85034282618 scopus 로고    scopus 로고
    • note
    • s.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.