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Surface and Coatings Technology

Volumn 100-101, Issue 1-3, 1998, Pages 480-485

Real-time control of the deposition of optical coatings by multiwavelength ellipsometry

(2) Kildemo, M a Drevillon B a

a LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES (France)

Author keywords

Ellipsometry; Optical coatings; Real time Control

Indexed keywords

CURVE FITTING; DEPOSITION; ELLIPSOMETRY; FEEDBACK CONTROL; GRADIENT INDEX OPTICS; LEAST SQUARES APPROXIMATIONS; LIGHT REFLECTION; LIGHT TRANSMISSION; OPTICAL FILMS; PLASMA APPLICATIONS; SILICA; SILICON NITRIDE;

MULTIWAVELENGTH PHASE MODULATED ELLIPSOMETRY (PME); REAL TIME CONTROL;

OPTICAL COATINGS;

EID: 0032026029 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(97)00675-0 Document Type: Article

Times cited : (5)

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