Real time control of plasma deposited multilayers by multiwavelength ellipsometry

Applied Physics Letters

Volumn 68, Issue 24, 1996, Pages 3395-3397

  Kildemo, M ^a   Bulkin, P ^a   Deniau, S ^a   Drevillon B ^a  

^a LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000409202     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.116515     Document Type: Article

References (12)

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10. M. Kildemo, S. Deniau, P. Bulkin, and B. Drévillon, Thin Solid Films (to be published).
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12. B. Drévillon, Science and Technology of Thin Films, edited by F. C. Matacotta and G. Ottaviani (World Scientific, Singapore, 1995), pp. 189-240.