The effects of gas-phase additives NH3, NO, and NO2 on SiH4/O2 chemical vapor deposition

Journal of the Electrochemical Society

Volumn 145, Issue 3, 1998, Pages 1070-1075

  Takahashi, Takahiro ^a,c   Hagiwara, Katsunori ^a   Komiyama, Hiroshi ^a   Egashira, Yasuyuki ^b  

^a UNIVERSITY OF TOKYO   (Japan)

^b OSAKA UNIVERSITY   (Japan)

^c ELECTROCHEMICAL SOCIETY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMMONIA; CHEMICAL REACTORS; COMPUTER SIMULATION; NITROGEN OXIDES; OXYGEN; SILANES; SILICA;

ROUGH FILMS; TUBULAR REACTORS;

CHEMICAL VAPOR DEPOSITION;

EID: 0032025457     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1838391     Document Type: Article

References (15)

1. T. Takahashi, K. Hagiwara, Y. Egashira, and H. Komiyama, in Proceedings of the First International Dielectrics for VLSI/ULSI Multilevel Interconnection Conference (DUMIC), p 183 (1995).
2. T. Takahashi, K. Hagiwara, Y. Egashira, and H. Komiyama, J. Electrochem. Soc., 143, 1355 (1996).
3. T. Takahashi, Y. Egashira, and H. Komiyama, Appl. Phys. Lett., 66, 2858 (1995).
4. E. R. Whitby and M. Hoshino, J. Electrochem. Soc., 143, 3397 (1996).
5. J. A. Britten, J. Tong, and C. K. Westbrook, in 23rd Symposium (International) on Combustion, p 195, The Combustion Institute Pittsburgh, Pennsylvania (1990).
6. S. Koda, Prog. Energy Combust. Sci., 18, 513 (1992).
7. E. A. Taft, J. Electrochem. Soc., 128, 1728 (1979).
8. S. T. Darian and M. Vanpee, Combustion and Flame, 70, 65 (1987).
9. M. Koshi, N. Nishida, Y. Murakami, and H. Matsui, J. Phys. Chem., 97, 4473 (1993).
10. M. Koshi, Private communication.
11. R. J. Kee, F. M. Rupley, and J. A. Miller, Sandia Report SAND89-8009 (1991).
12. W. C. Gardiner, Jr., Combustion Chemistry, Springer-Verlag, New York, p 412 (1984).
13. A. E. Lutz, R. J. Kee, and J. A. Miller, Sandia Report SAND87-8248 (1988).
14. Y. Shimogaki, T. Uchida, T. Saito, Y. Egashira, K. Sugawara, and H. Komiyama, in Proceedings of Advanced Metallization for ULSI Applications 1992, T. S. Cale and F. S. Pintchovski, Editors, p 225, Material Research Society, Pittsburgh, PA (1993).
15. C. L. Darling and H. B. Schlegel, J. Phys. Chem., 97, 8207 (1993).