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Applied Surface Science

Volumn 109-110, Issue , 1997, Pages 293-298

Deposition of BaTiO 3 thin films by a hybrid DC-field enhanced PLD-process

(4) Husmann, A a Mertin, M b Klotzbucher T a Kreutz, E W a

a RWTH AACHEN UNIVERSITY (Germany)

b FRAUNHOFER INSTITUTE FOR LASER TECHNOLOGY (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BARIUM COMPOUNDS; CHEMICAL VAPOR DEPOSITION; DIELECTRIC PROPERTIES; ELECTRIC FIELD EFFECTS; ELECTRIC IMPEDANCE MEASUREMENT; ELECTRIC PROPERTIES; EMISSION SPECTROSCOPY; EXCIMER LASERS; PERMITTIVITY MEASUREMENT; PULSED LASER APPLICATIONS; RAMAN SPECTROSCOPY; X RAY DIFFRACTION ANALYSIS;

PLASMA EMISSION SPECTROSCOPY; PULSED LASER DEPOSITION (PLD) TECHNIQUE;

THIN FILMS;

EID: 0031077886 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/S0169-4332(96)00624-1 Document Type: Article

Times cited : (10)

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