Measurement of excess energies of ion beams extracted from a microwave ion source

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 136-138, Issue , 1998, Pages 793-797

  Sakudo, N ^a   Hayashi, K ^a   Yokota, J ^a   Kawasaki, A ^a   Ikenaga, N ^a   Sakaguchi, N ^a  

^a KANAZAWA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Excess energy; Ion beam; Low energy; Microwave ion source; Plasma potential

Indexed keywords

ION SOURCES; MAGNETIC FIELDS; PARTICLE BEAM EXTRACTION; PLASMA APPLICATIONS;

MICROWAVE ION SOURCES;

ION BEAMS;

EID: 0032020994     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00763-5     Document Type: Article

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