Exact energy values of ‘‘low‐energy ion beams’’

Review of Scientific Instruments

Volumn 67, Issue 3, 1996, Pages 1218-1220

  Sakudo, N ^a   Hayashi, K ^a  

^a KANAZAWA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

BEAM EXTRACTION; ELECTRON TEMPERATURE; ENERGY BEAM DEPOSITION; ENERGY SPECTRA; EV RANGE; ION BEAMS; ION IMPLANTATION; PLASMA POTENTIAL

Indexed keywords

EID: 0041504632     PISSN: 00346748     EISSN: 10897623     Source Type: Journal    
DOI: 10.1063/1.1146737     Document Type: Conference Paper

References (10)

1. A. Bousetta, J. A. Van den Berg, R. Valizadeh, D. G. Armour, and P. C. Zalm, Nucl. Instrum. Methods B 55, 569 (1991).NIMBEU
2. A. S. Devaney, N. Bryan, H. Ito, D. A. Loome, D. G. Armour, and M. A. Foad, Ion Implant. Technol. 482 (1995).
3. K. Yagi, K. Miyake, and T. Tokuyama, Inst. Phys. Conf. Ser. No. 38, 136 (1978).
4. K. Miyake and K. Ohashi, Jpn. J. Appl. Phys. Lett. 32, L120 (1993).
5. M. A. Foad, S. M. Chen, R. Valizadeh, S. Moffatt, and D. G. Armour, Ion Implant. Technol. 922 (1995).
6. K. Suzuki, S. Okudaira, N. Sakudo, and I. Kanomata, Jpn. J. Appl. Phys. 16, 1979 (1977).JJAPA5
7. U. J. Gibson, Nucl. Instrum. Methods, B 74, 322 (1993).NIMBEU
8. A. van Steenbergen, IEEE Trans. Nucl. Sci., NS-12, 746 (1965).IETNAE
9. K. Tokiguchi, N. Sakudo, and H. Koike, J. Vac. Sci. Technol. A 2, 29 (1984).JVTAD6
10. N. Sakudo, K. Tokiguchi, H. Koike, and I. Kanomata, Rev. Sci. Instrum. 48, 762 (1977).RSINAK