Composition analysis of Co doped FeSix films by combining standard and heavy-ion RBS

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 136-138, Issue , 1998, Pages 273-277

  Bohne, W ^a   Reinsperger, G U ^a   Rohrich J ^a   Roschert G ^a   Selle, B ^a  

^a HAHN MEITNER INSTITUT   (Germany)

Author keywords

Epitaxy; FTIR spectroscopy; RBS; Silicides; Thin films

Indexed keywords

COBALT; COMPOSITION EFFECTS; EVAPORATION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; IRON COMPOUNDS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SEMICONDUCTOR DOPING; SUBSTRATES; THIN FILMS; VAPOR DEPOSITION;

SILICIDES;

SEMICONDUCTING FILMS;

EID: 0032020869     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00697-6     Document Type: Article

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