Time-of-flight ERDA of dual implanted metals

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 136-138, Issue , 1998, Pages 644-648

  Dytlewski, N ^a   Evans, P J ^a   Brown, I G ^b   Liu, F ^b,d   Oks, E M ^c   Yushkov, G Y ^c  

^a AUSTRALIAN NUCLEAR SCIENCE AND TECHNOLOGY ORGANISATION   (Australia)

^b LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^c INSTITUTE OF HIGH CURRENT ELECTRONICS   (Russian Federation)

^d BEIJING NORMAL UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; CHROMIUM; ION BEAMS; ION IMPLANTATION; NITROGEN; OXYGEN; SPECTROMETRY; TITANIUM; ZIRCONIUM;

ELASTIC RECOIL DETECTION ANALYSIS (ERDA); HEAVY ION TIME OF FLIGHT RECOIL SPECTROMETRY;

STAINLESS STEEL;

EID: 0032017510     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00782-9     Document Type: Article

References (10)

1. I.G. Brown, J.E. Galvin, B.F. Gavin, R.A. MacGill, Rev. Sci. Instrum. 57 (1986) 1069.
2. I.G. Brown. Rev. Sci, Instrum. 65 (1994) 3061.
3. P. Spädtke, H. Emig, B.H. Wolf, E.M. Oks, Rev. Sci. Instrum. 65 (1994) 3113.
4. E.M. Oks. I.G. Brown, M.R. Dickinson, R.A. MacGill, Rev. Sci. Instrum. 67 (1996) 959.
5. E.M. Oks, G.Yu. Yushkov, P.J. Evans, A. Oztarhan, I.G. Brown. M.R. Dickinson, F. Liu, R.A. MacGill, O.R. Monteiro, Z. Wang, Nucl. Instr. and Meth. B 127-128 (1997) 782.
6. J.W. Martin, D.D. Cohen, N. Dytlewski, D.B. Garton, H.J. Whitlow, G.J. Russell, Nucl. Instr. and Meth. B 94 (1994) 277.
7. J. Jokinen, J. Keinonen, P. Tikkanen, A. Kuronen, T. Ahlgren, K. Nordlund, Nucl. Instr. and Meth. B 119 (1996) 533.
8. A.G. Duffy, L. Clapham, J.L. Whitton, M.C. Ridgeway, Nucl. Instr. and Meth. B 106 (1995) 504.
9. J.F. Ziegler, J.P. Biersack, U. Littmark, The Stopping and Range of Ions in Solids. Pergamon Press, New York, 1985.
10. I.G. Brown, X. Godechot, IEEE Trans. Plasma Sci. 19 (1991) 713.