Comparative study of kinetic energy spectra and mass distributions of Ta+n ions sputtered from tantalum by atomic and molecular ion bombardment

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 136-138, Issue , 1998, Pages 773-778

  Belykh, S F ^a   Rasulev, U Kh ^a   Samartsev, A V ^a   Veryovkin, I V ^a,b  

^a S YU YUNUSOV INSTITUTE OF THE CHEMISTRY OF PLANT SUBSTANCES   (Uzbekistan)

^b UNIVERSITY OF ANTWERP   (Belgium)

Author keywords

Cluster bombardment; Cluster kinetic energy spectra; Cluster mass distributions; Cluster sputtering; Non additive effects in sputtering; Unimolecular fragmentation

Indexed keywords

ATOMS; SPUTTERING; TANTALUM;

KINETIC ENERGY;

ION BOMBARDMENT;

EID: 0032017471     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00861-6     Document Type: Article

References (35)

1. R.E. Honig, J. Appl. Phys. 29 (1958) 549.
2. H.M. Urbassek, W.O. Hofer, Det kongelige Danske Vid. Selsk. Mat. Fys. Medd. 43 (1993) 97.
3. W.O. Hofer, in: R. Behrisch, K. Wittmaack (Eds.), Sputtering by Particle Bombardment, vol.3, Springer, Berlin, 1991.
4. W. Ens, R. Beavis, K.G. Standing, Phys. Rev. Lett. 50 (1983) 27.
5. N.Kh. Dzhemilev, S.V. Verkhoturov, U.Kh. Rasulev Poverkhnost, Fizika Chimija Mekhanika 2 (1986) 86.
6. I. Katakuze, T. Ichihara, Y. Fujita, T. Matsuo, T. Sakurai, H. Matsuda, Int. J. Mass Spectrom. Ion Proc. 67 (1985) 229.
7. W. Begemann, K.H. Meiwes-Broer, H.O. Lutz, Phys. Rev. Lett. 56 (1985) 2248.
8. N.Kh. Dzhemilev, U.Kh. Rasulev, S.V. Verkhoturov, Nucl. Instr. and Meth B 29 (1987) 531.
9. N.Kh. Dzhemilev, S.V. Verkhoturov, I.V. Veriovkin, Nucl. Instr. and Meth. B 51 (1990) 219.
10. I. Katakuze, H. Ito, T. Ichihara, Int. J. Mass Spectrum. Ion Proc. 97 (1990) 47.
11. W. Begemann, K.H. Meiwes-Broer, H.O. Lutz, J. Phys. (Paris) 50 (1989) 133.
12. H. Gnaser, W.O. Hofer, Appl. Phys. A 48 (1989) 261.
13. H. Oechner, Int. J. Mass Spectrom. Ion Proc. 103 (1990) 31.
14. B.N. Makarenko, A.B. Popov, A.A. Shaporenko, A.P. Shergin, Radiat. Eff. Def. Solids 116 (1991) 15.
15. S.R. Coon, W.F. Calaway, J.W. Burnett, M.J. Pellin, D.M. Gruen, D.R. Spiegel, J.M. White, Surf. Sci. 259 (1991) 275.
16. S.R. Coon, W.F. Calaway, M.J. Pellin, G.A. Curlec, J.M. White, Nucl. Instr. and Meth. B 82 (1993) 329.
17. A. Wucher, M. Wahl, H. Oechner, Nucl. Instr. and Meth. B 82 (1993) 337.
18. A. Wucher, M. Wahl, in: A. Bennighoven, H.W. Werner, B. Hegenhoff ( Eds.), Secondary Ion Mass Spectrometry SIMS X, Wiley, New York, 1997, p. 65.
19. A. Wucher, M. Wahl, Nucl. Instr. and Meth. B 115 (1996) 581.
20. D.A. Thompson, Radiat. Eff. 56 (1981) 105.
21. M. Benguerba, A. Brunelle, M.G. Blain, E.A. Schweikert, G. Ben Assayag, P. Sudraud, Nucl. Instr. and Meth. B 62 (1991) 8.
22. K. Baudin, A. Brunelle, S. Della-Negra, D. Jacquet, P. Hakansson, Y. Le Beyec, M. Pautrat, R.R. Pinho, Ch. Schoppmann, Nucl. Instr. and Meth. B 112 (1996) 59.
23. S.F. Belykh, I.S. Bitensky, D. Mullajanov, U.Kh. Rasulev, Nucl. Instr. and Meth. B 129 (1997) 451.
24. S.F. Belykh, U.Kh. Rasulev, A.V. Samartsev, S.V. Verkhoturov, I.V. Veryovkin, Microchimica Acta., in press.
25. S.F. Belykh, R.N. Evtukhov, Ju.N. Lysenko, U.Kh. Rasulev, Rev. Sci. Instr. 63 (1992) 2458.
26. N.Kh. Dzhemilev, A.M. Goldenberg, I.V. Veriovkin, S.V. Verkhoturov, Nucl. Instr. and Meth. B 114 (1996) 245.
27. P. Sigmund, in: R. Behrish (Ed.), Sputtering by Particle Bombardment, vol. 1, Springer, Berlin, 1981, p. 9.
28. G.P. Können, A. Tip, A.E. de Vries, Radiat. Eff. 21 (1974) 269; Radiat. Eff. 26 (1975) 23.
29. G.P. Können, A. Tip, A.E. de Vries, Radiat. Eff. 21 (1974) 269; Radiat. Eff. 26 (1975) 23.
30. W. Gerhard, Z. Phys B 22 (1975) 31; W. Gerhard, H. Oechner, Z. Phys. B 22 (1975) 41.
31. W. Gerhard, Z. Phys B 22 (1975) 31; W. Gerhard, H. Oechner, Z. Phys. B 22 (1975) 41.
32. M.A. Rudat, G.H. Morrison, Surf. Sci. 82 (1979) 549.
33. N.Kh. Dzhemilev, A.M. Goldenberg, I.V. Veriovkin, S.V. Verkhoturov, Int. J. Mass Spectrom. Ion Proc. 107 (1991) R19.
34. J.F. Ziegler, J.P. Biersack, U. Littmark (Eds.), The stopping, Range of Ions in Solids, Pergamon Press, New York, 1985, SRIM-97 program is available in: http://www.research.ibm.com/ionbeams/.
35. A. Wucher, B.J. Garrison, J. Chem. Phys 105 (14) (1996) 5999.