An optical emission spectroscopic study on visible laser ablation of Ta 2 O 5 in ambient O 2

Applied Surface Science

Volumn 125, Issue 2, 1998, Pages 208-212

  Zhou, Mingfei ^a   Fu, Zhengwen ^a   Qin, Qizong ^a  

^a FUDAN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

EMISSION SPECTROSCOPY; FILM GROWTH; LASER ABLATION; LIGHT EMISSION; OXYGEN; PRESSURE EFFECTS;

OPTICAL EMISSION SPECTROSCOPY; TANTALUM OXIDE;

TANTALUM COMPOUNDS;

EID: 0032002677     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(97)00377-2     Document Type: Article

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