Analysis of optical spectra by Fourier methods

Thin Solid Films

Volumn 313-314, Issue , 1998, Pages 143-148

  Yoo, S D ^a   Edwards, N V ^b   Aspnes, D E ^a,b  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

^b North Carolina State University   (United States)

Author keywords

Critical points; Filtering; Fourier analysis; Reflectance; Spectroscopic ellipsometry

Indexed keywords

ELLIPSOMETRY; FOURIER TRANSFORMS; LIGHT REFLECTION; MONOCHROMATORS; OPTICAL CORRELATION; SPECTROMETRY;

OPTICAL SPECTROSCOPY; RECIPROCAL SPACE ANALYSIS;

SEMICONDUCTING GALLIUM ARSENIDE;

EID: 0032002314     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00801-8     Document Type: Article

References (11)

1. D.E. Aspnes, J. Vac. Sci. Technol. B 3 (1985) 1498.
2. P.S. Hauge, Surface Sci. 96 (1980) 108.
3. D.E. Aspnes, J.P. Harbison, A.A. Studna, L.T. Florez, J. Vac. Sci. Technol. A 6 (1988) 1327.
4. D.E. Aspnes, I. Kamiya, H. Tanaka, R. Bhat, L.T. Florez, J.P. Harbison, W.E. Quinn, M. Tamargo, S. Gregory, M.A.A. Pudensi, S.A. Schwarz, M.J.S.P. Brasil, R.E. Nahory, Thin Solid Films 225 (1993) 26.
5. D.E. Aspnes, Surface Sci. 135 (1983) 284.
6. R.P. Vasquez, J.D. Klein, J.J. Barton, F.J. Grunthaner, J. Electron Spectrosc. Relat. Phenom. 23 (1981) 63.
7. D.P. Wang, C.T. Chen, Appl. Phys. Lett. 67 (1995) 2069.
8. Y. Wang, W.H. Weinberg, Surface Sci. 287/288 (1992) 1102.
9. S.D. Yoo, D.E. Aspnes, S.J. Rhee, J.C. Woo, Appl. Phys. Lett. 68 (1996) 3230.
10. D.E. Aspnes, A.A. Studna, Phys. Rev. B 27 (1983) 985.
11. N.V. Edwards, S.D. Yoo, M.D. Bremser, T.W. Weeks, Jr., O.H. Nam, H. Liu, R.A. Stall, M.N. Horton, N.R. Perkins, T.F. Kuech, D.E. Aspnes, Appl. Phys. Lett. 70 (1997) 2001.