Characterization of deep centers in undoped semi-insulating GaAs substrates by normalized thermally stimulated current spectroscopy: Comparison of 100 and 150 mm wafers

Journal of Electronic Materials

Volumn 27, Issue 2, 1998, Pages 62-68

  Fang, Z Q ^a   Look, D C ^a   Mier, M G ^b  

^a WRIGHT STATE UNIVERSITY   (United States)

^b AIR FORCE RESEARCH LABORATORY   (United States)

Author keywords

Defects; Normalized thermally stimulated current (NTSC) spectroscopy; Semi insulating (SI) GaAs

Indexed keywords

CRYSTAL DEFECTS; CRYSTAL GROWTH FROM MELT; ELECTRIC FIELD EFFECTS; LOW TEMPERATURE PROPERTIES; SEMICONDUCTOR DOPING; SEMICONDUCTOR GROWTH; SPECTROSCOPIC ANALYSIS; SUBSTRATES;

INFRARED PHOTOCURRENTS; LOW/HIGH PRESSURE LIQUID ENCAPSULATED CZOCHRALSKI TECHNIQUES; NORMALIZED THERMALLY STIMULATED CURRENT (NTSC) SPECTROSCOPY;

SEMICONDUCTING GALLIUM ARSENIDE;

EID: 0031999651     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-998-0189-x     Document Type: Article

References (15)

1. D.C. Look, Semiconductors and Semimetals 19, 75 (1983).
2. D.I. Desnica, J. Electron. Mater. 21, 463 (1992).
3. Z.-Q. Fang, D.C. Look, S. Kuisma, K. Saarinen and P. Hautojarvi, Proc. 9th Conf. on Semiconducting and Insulating Materials, Toulouse, France, ed. C. Fontaine (New York: IEEE, Inc., 1996), p. 149.
4. D.C. Look, Z.-Q. Fang, J.W. Hemsky and P. Kengkan, Phys. Rev. 555, 2214 (1997).
5. Z.-Q. Fang and D.C. Look, Semi-Insulating III-VMaterials, Warsaw 1994, ed. M. Godlewski (World Scientific), p. 143.
6. H. Yoshida, M. Kiyama, T. Takebe, K. Fujita and S.-I. Akai, Jpn. J. Appl. Phys. 36, 19 (1997).
7. M.G. Mier, D.C. Look, D.C. Walters and D.L. Beasley, Solid State Electron. 35, 319 (1992).
8. Z.-Q. Fang and D.C. Look, J. Appl. Phys. 69, 8177 (1991).
9. Z.-Q. Fang and D.C. Look, Appl. Phys. Lett. 59, 48 (1991).
10. W. Siegel and G. Kuhnel, Semi-Insulating III-V Materials, Warsaw 1994, ed. M. Godlewski (World Scientific), p. 193.
11. Z.-Q. Fang and D.C. Look, Appl. Phys. Lett. 66, 3033 (1995).
12. Z.-Q. Fang, D.C. Look, H. Yamamoto and H. Shimakura, Appl. Phys. Lett. 69, 3417 (1996).
13. Unpublished.
14. Z.-Q. Fang, D.C. Reynolds, D.C. Look, N.G. Paraskevopoulos, T.E. Anderson and R.L. Jones, J. Appl. Phys. 83, 260 (1998).
15. Z.-Q. Fang and D.C. Look, Inst. Phys. Conf. Ser. 149, 43 (Bristol: Institute of Physics, 1996).