The application of a low energy loss electron detector in conjunction with scanning Auger microscopy: An aid to quantitative surface microscopy

Applied Surface Science

Volumn 120, Issue 1-2, 1997, Pages 129-138

  Barkshire, I R ^a,b   Roberts, R H ^a   Prutton, M ^a  

^a UNIVERSITY OF YORK   (United Kingdom)

^b GEC Marconi Materials Technology Ltd   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SILICON; TITANIUM; TITANIUM NITRIDE; TUNGSTEN;

BACKSCATTERED ELECTRON; LOW ENERGY LOSS ELECTRON DETECTOR; SCANNING AUGER MICROSCOPY; SECONDARY ELECTRON; SURFACE MICROSCOPY;

SURFACE STRUCTURE;

EID: 0031276847     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(97)00225-0     Document Type: Article

References (9)

1. H. Niedrig, J. Appl. Phys. 53 (1982) R15.
2. L. Reimer, Scanning Electron Microscopy, Vol. 4, Springer Series in Optical Sciences, Springer, Berlin, 1985.
3. O. Wells, Scanning Electron Microscopy, McGraw-Hill, New York, 1974.
4. O. Wells, Scanning Electron Microscopy, McGraw-Hill, 1972, p. 169.
5. M. Prutton, C.G.H. Walker, J.C. Greenwood, P.G. Kenny, J.C. Dee, I.R. Barkshire, R.H. Roberts, M.M. El Gomati, Surf. Interf. Anal. 17 (1991) 71.
6. S. Tanuma, C.J. Powell, D.R. Penn, Surf. Interf. Anal. 17 (1991) 927.
7. M.P. Seah, Quantitative Microbeam Analysis, Institute of Physics, Bristol, 1993, p. 1.
8. Z. Czyzewski, D. Macallum, A. Rowe, D. Joy, J. Appl. Phys. 68 (1990) 3036.
9. H. Bender, J. Portillo, W. Vandervorst, Surf. Interf. Anal. 14 (1989) 337.