Effects of electron-beam parameters on critical-dimension measurements

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 6, 1996, Pages 4014-4019

  Mizuno, Fumio ^a   Satoh, Osamu ^a  

^a HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000958682     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588634     Document Type: Article

References (2)

1. F. Mizuno, S. Yamada, A. Miura, K. Takamoto, and T. Ohtaka, IEICE Trans. Electron. E 76-C, 600 (1993).
2. F. Mizuno and S. Yamada, J. Vac. Sci. Technol. B 13, 2682 (1995).