Contact and alignment marker technology for atomic scale device fabrication

Microelectronic Engineering

Volumn 41-42, Issue , 1998, Pages 567-570

  Zuiddam, M R ^a   Rogge, S ^a   Gecrligs, L J ^a   Van Der Drift, E ^a   Ilge, B ^a   Palasantzas, G ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONTACTS; ELECTRODES; FABRICATION; PLATINUM; THERMODYNAMIC STABILITY; TUNGSTEN;

ATOMIC SCALE DEVICES;

NANOTECHNOLOGY;

EID: 0031707683     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(98)00133-6     Document Type: Article

References (11)

1. G.R. Hilbrandie, S.J.M. Bakker, E. van doDrift, B.A.C. Rousseeuw, T.M. Klapwijk and S. Radelaar, Microelectronic Eng. 23, 445 (1994).
2. S.J. Tans, M.H. Devoret, H. Dai, A. Thess, R.E. Smalley, L.J. Geerligs, and C. Dekker, Nature 386, 474 (1997).
3. S.P. Murarka, Suicides for VLSI applications (Academic Press, Orlando, 1983).
4. C.Y. Chang and S.M. Sze, ULSI Technology, ch. 2 and 3 (McGraw-Hill, New York, 1996).
5. Oxford Applied Research CARS25I
6. A.W. Dunn, B.N. Cotier, A. Nogaret, P. Moriarty, and P.H. Beton, preprint, submitted to Appl. Phys. Lett.
7. S. Pramanick, Y.N. Erokhin, B.K. Patnaik and G.A. Rozgonyi, Appl. Phys. Lett. 63, 1933 (1993).
8. Y. Morita, and H.Tokumoto, Appl. Phys. Lett. 67 2654 (1995)
9. For example, G.J. Pietsch, U. Koehler, and M. Henzler, J. Appl. Phys. 73, 4797 (1993); T. Komeda, Y. Morita, and H. Tokumoto, Surf. Sci. 348, 153 (1996); Y. Morita, and H. Tokumoto, Appl. Surf. Sci. 100/101, 440 (1996).
10. For example, G.J. Pietsch, U. Koehler, and M. Henzler, J. Appl. Phys. 73, 4797 (1993); T. Komeda, Y. Morita, and H. Tokumoto, Surf. Sci. 348, 153 (1996); Y. Morita, and H. Tokumoto, Appl. Surf. Sci. 100/101, 440 (1996).
11. For example, G.J. Pietsch, U. Koehler, and M. Henzler, J. Appl. Phys. 73, 4797 (1993); T. Komeda, Y. Morita, and H. Tokumoto, Surf. Sci. 348, 153 (1996); Y. Morita, and H. Tokumoto, Appl. Surf. Sci. 100/101, 440 (1996).