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Volumn 6, Issue 2, 1996, Pages 237-266

Linear and non-linear piezoresistance coefficients in cubic semiconductors. I. Theoretical formulations

Author keywords

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Indexed keywords


EID: 0012024471     PISSN: 11554320     EISSN: None     Source Type: Journal    
DOI: 10.1051/jp3:1996121     Document Type: Article
Times cited : (13)

References (36)
  • 2
    • 0345026442 scopus 로고
    • Academic Press, New York
    • Mason W.P., in Physical Acoustics, vol. 1 pt B (Academic Press, New York, 1960) pp. 194-214.
    • (1960) Physical Acoustics , vol.1 , Issue.PART B , pp. 194-214
    • Mason, W.P.1
  • 3
    • 0022813884 scopus 로고
    • New Technology of sensors for automotive applications
    • Igarashi I., New Technology of sensors for automotive applications, Sens. and Actuators 13 (1988) 181-193.
    • (1988) Sens. and Actuators , vol.13 , pp. 181-193
    • Igarashi, I.1
  • 4
    • 0020781157 scopus 로고
    • Temperature sensitivity in silicon piezoresistive pressure transducers
    • Kim S.-C. and Wise K.D., Temperature sensitivity in silicon piezoresistive pressure transducers, IEEE Trans. Electron. Devices 30 (1983) 802-810.
    • (1983) IEEE Trans. Electron. Devices , vol.30 , pp. 802-810
    • Kim, S.-C.1    Wise, K.D.2
  • 6
    • 0018753690 scopus 로고
    • Pressure sensitivity in anisotropically etched thin diaphragm pressure sensors
    • Clark S.K. and Wise K.D., Pressure sensitivity in anisotropically etched thin diaphragm pressure sensors, IEEE Trans. Electron. Devices 26 (1979) 1887-1896.
    • (1979) IEEE Trans. Electron. Devices , vol.26 , pp. 1887-1896
    • Clark, S.K.1    Wise, K.D.2
  • 7
    • 0026187499 scopus 로고
    • Piezoresistance effect of silicon
    • Kanda Y., Piezoresistance effect of silicon, Sens. and Actuators A 28 (1991) 83-91.
    • (1991) Sens. and Actuators A , vol.28 , pp. 83-91
    • Kanda, Y.1
  • 8
    • 0024702153 scopus 로고
    • The effect of shear stress on the piezoresistance of silicon
    • Wang Y., Bao M.-H. and Yu L.-Z., The effect of shear stress on the piezoresistance of silicon, Sens. and Actuators 18 (1989) 221-231.
    • (1989) Sens. and Actuators , vol.18 , pp. 221-231
    • Wang, Y.1    Bao, M.-H.2    Yu, L.-Z.3
  • 9
    • 0020127035 scopus 로고
    • Silicon as a mechanical material
    • Petersen K.E., Silicon as a mechanical material, Proc. IEEE 70 (1982) 420-457.
    • (1982) Proc. IEEE , vol.70 , pp. 420-457
    • Petersen, K.E.1
  • 10
    • 0022246331 scopus 로고
    • Micromechanics: A silicon fabrication technology
    • Csepregi L., Micromechanics: a silicon fabrication technology, Microelectr. Eng. 3 (1985) 221-234.
    • (1985) Microelectr. Eng. , vol.3 , pp. 221-234
    • Csepregi, L.1
  • 11
    • 0025698091 scopus 로고
    • A novel silicon accelerometer with surrounding mass structure
    • Hamada K., Higuchi K. and Tamigawa T., A novel silicon accelerometer with surrounding mass structure, Sens. and Actuators A 21-23 (1990) 308-311.
    • (1990) Sens. and Actuators A , vol.21-23 , pp. 308-311
    • Hamada, K.1    Higuchi, K.2    Tamigawa, T.3
  • 12
    • 0026186579 scopus 로고
    • Pressure sensors merge micro machining and microelectronics
    • Frank R., Pressure sensors merge micro machining and microelectronics, Sens. and Actuators A 28 (1991) 93-103.
    • (1991) Sens. and Actuators A , vol.28 , pp. 93-103
    • Frank, R.1
  • 13
    • 0020843244 scopus 로고
    • Three dimensional structuring of silicon for sensor applications
    • Seidel H. and Csepregi L., Three dimensional structuring of silicon for sensor applications, Sens. and Actuators 4 (1983) 455-463.
    • (1983) Sens. and Actuators , vol.4 , pp. 455-463
    • Seidel, H.1    Csepregi, L.2
  • 15
    • 0028550078 scopus 로고
    • Anisotropic etching of silicon crystals in KOH solution Part I: Experimental etched shapes and determination of the dissolution slowness surface
    • Tellier C.R. and Brahim-Bounab A., Anisotropic etching of silicon crystals in KOH solution Part I: experimental etched shapes and determination of the dissolution slowness surface, J. Mater. Sci. 29 (1994) 5953-5971.
    • (1994) J. Mater. Sci. , vol.29 , pp. 5953-5971
    • Tellier, C.R.1    Brahim-Bounab, A.2
  • 16
    • 0028693832 scopus 로고
    • Anisotropic etching of silicon crystals in KOH solution. Part II: Theoretical two-dimensional etched shapes: discussion of the adequation of the dissolution slowness surface
    • Tellier C.R. and Brahim-Bounab A., Anisotropic etching of silicon crystals in KOH solution. Part II: Theoretical two-dimensional etched shapes: discussion of the adequation of the dissolution slowness surface, J. Mater. Sci. 29 (1994) 6354-6378.
    • (1994) J. Mater. Sci. , vol.29 , pp. 6354-6378
    • Tellier, C.R.1    Brahim-Bounab, A.2
  • 17
    • 6644226734 scopus 로고
    • Micro-fabricated siliconstructures: Experimental and theoretical investigations of 3D etched shapes
    • Besanìon-France, 8-10 mars 1995 Conseil Général du Doubs
    • Tellier C.R. and Durand S., Micro-fabricated siliconstructures: Experimental and theoretical investigations of 3D etched shapes, 9th European Frequency and Time Forum, Besanìon-France, 8-10 mars 1995 (Conseil Général du Doubs, 1995) pp. 426-429.
    • (1995) 9th European Frequency and Time Forum , pp. 426-429
    • Tellier, C.R.1    Durand, S.2
  • 19
    • 0011712475 scopus 로고
    • Macroscopic symmetry and properties of crystals
    • Smith C.S., Macroscopic symmetry and properties of crystals, Solid State Phys. 6 (1958) 175-249.
    • (1958) Solid State Phys. , vol.6 , pp. 175-249
    • Smith, C.S.1
  • 20
    • 0001558496 scopus 로고
    • Use of piezoresistive materials in the measurement of displacement, force and torque
    • Mason W.P. and Thurston R.N., Use of piezoresistive materials in the measurement of displacement, force and torque, J. Acoust. Soc. Am. 29 (1957) 1096-1101.
    • (1957) J. Acoust. Soc. Am. , vol.29 , pp. 1096-1101
    • Mason, W.P.1    Thurston, R.N.2
  • 23
    • 0022755221 scopus 로고
    • Nonlinear effects in the piezoresistivity of P-type silicon
    • Lenkkeri J.T., Nonlinear effects in the piezoresistivity of P-type silicon, Phys. Stat. Sol. (b) 136 (1986) 373-385.
    • (1986) Phys. Stat. Sol. (B) , vol.136 , pp. 373-385
    • Lenkkeri, J.T.1
  • 24
    • 0011047645 scopus 로고    scopus 로고
    • Use of semiconductor transducers in measuring strains, accelerations and displacements
    • Academic Press, New York
    • Thurston R.N., Use of semiconductor transducers in measuring strains, accelerations and displacements, Physical Acoustics, vol. 1, pt B, (Academic Press, New York, 1996) pp. 215-235.
    • (1996) Physical Acoustics , vol.1 , Issue.PART B , pp. 215-235
    • Thurston, R.N.1
  • 25
    • 34249846476 scopus 로고
    • Semiconducting stress transducers utilizing the transverse and shear piezoresistance effects
    • Pfann W.G. and Thurston R.N., Semiconducting stress transducers utilizing the transverse and shear piezoresistance effects, J. Appl. Phys. 32 (1961) 2008-2019.
    • (1961) J. Appl. Phys. , vol.32 , pp. 2008-2019
    • Pfann, W.G.1    Thurston, R.N.2
  • 26
    • 0019586319 scopus 로고
    • Hall effect devices as strain and pressure sensors
    • Kanda Y. and Yasukava K., Hall effect devices as strain and pressure sensors, Sens. and Actuators 2 (1982) 283-296.
    • (1982) Sens. and Actuators , vol.2 , pp. 283-296
    • Kanda, Y.1    Yasukava, K.2
  • 27
    • 36149003661 scopus 로고
    • Deformation potentials in silicon III. Effects of a general strain on conduction and valence levels
    • Goroff I. and Kleinman L., Deformation potentials in silicon III. Effects of a general strain on conduction and valence levels, Phys. Rev. 132 (1963) 1080-1084.
    • (1963) Phys. Rev. , vol.132 , pp. 1080-1084
    • Goroff, I.1    Kleinman, L.2
  • 31
    • 0024619998 scopus 로고
    • A tensorial representation of the dissolution slowness - Application to etched singly rotated quartz plates
    • Tellier C.R. and Vaterkowski J.L., A tensorial representation of the dissolution slowness - Application to etched singly rotated quartz plates, J. Mater. Sci. 24 (1989) 1077-1088.
    • (1989) J. Mater. Sci. , vol.24 , pp. 1077-1088
    • Tellier, C.R.1    Vaterkowski, J.L.2
  • 32
    • 0024682694 scopus 로고
    • A three-dimensional kinematic model for the dissolution of crystals
    • Tellier C.R., A three-dimensional kinematic model for the dissolution of crystals, J. Cryst. Growth 96 (1989) 450-452.
    • (1989) J. Cryst. Growth , vol.96 , pp. 450-452
    • Tellier, C.R.1
  • 33
    • 0012052045 scopus 로고
    • The dissolution slowness surface of cubic crystals. Part I: Theoretical and three-dimensional representation for class 23
    • Brahim-Bounab A., Amaudrut J.Y. and Tellier C.R., The dissolution slowness surface of cubic crystals. Part I: Theoretical and three-dimensional representation for class 23, J. Mater. Sci. 23 (1991) 5585-5595.
    • (1991) J. Mater. Sci. , vol.23 , pp. 5585-5595
    • Brahim-Bounab, A.1    Amaudrut, J.Y.2    Tellier, C.R.3
  • 34
    • 85047673143 scopus 로고
    • The dissolution slowness surface of cubic crystals. Part II: Applications to class 23 and to combined etching and lithography techniques
    • Tellier C.R., Amaudrut J.Y. and Brahim-Bounab A., The dissolution slowness surface of cubic crystals. Part II: Applications to class 23 and to combined etching and lithography techniques, J. Mater. Sci. 26 (1991) 5595-5607.
    • (1991) J. Mater. Sci. , vol.26 , pp. 5595-5607
    • Tellier, C.R.1    Amaudrut, J.Y.2    Brahim-Bounab, A.3
  • 35
    • 0027838101 scopus 로고
    • Bi- and three-dimensional prediction of etching shapes in quartz micromachined structures
    • Salt Lake City, June 2-4 (IEEE, Piscataway, NJ)
    • Tellier C.R. and Leblois Th., Bi- and three-dimensional prediction of etching shapes in quartz micromachined structures, Proc. of IEEE Frequency Control Symp., Salt Lake City, June 2-4 1993 (IEEE, Piscataway, NJ) pp. 397-406.
    • (1993) Proc. of IEEE Frequency Control Symp. , pp. 397-406
    • Tellier, C.R.1    Leblois, Th.2
  • 36
    • 0342504129 scopus 로고
    • Micromachining of quartz crystals: Experiments and three-dimensional simulation of etched shapes
    • Munich, March 9-11 1994 VDI- Projekt und Service, Dusseldorf
    • Tellier C.R. and Benmessaouda D., Micromachining of quartz crystals: experiments and three-dimensional simulation of etched shapes, Proceedings of 8th European Frequency and Time Forum, Munich, March 9-11 1994 (VDI- Projekt und Service, Dusseldorf, 1994) 245-255.
    • (1994) Proceedings of 8th European Frequency and Time Forum , pp. 245-255
    • Tellier, C.R.1    Benmessaouda, D.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.