Self-Terminated CVD-Functionalization of Organic Self-Assembled Monolayers (SAMs) with Trimethylamine Alane (TMAA)

Chemical Vapor Deposition

Volumn 4, Issue 1, 1998, Pages 17-21

  Weiß, Jurij ^a   Himmel, Hans Jörg ^b   Fischer, Roland A ^a   Wöll, Christof ^b  

^a UNIVERSITY OF HEIDELBERG   (Germany)

^b RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

CVD; Functionalized SAMs; Selective deposition; Surface chemistry; Trimethylamine alane

Indexed keywords

ATOMIC FORCE MICROSCOPY; FILM PREPARATION; LOW TEMPERATURE OPERATIONS; METALLIZING; MOLECULAR ORIENTATION; MOLECULAR STRUCTURE; MONOLAYERS;

SELF ASSEMBLED MONOLAYERS (SAM); TRIMETHYLAMINE ALANE;

METALLORGANIC CHEMICAL VAPOR DEPOSITION;

EID: 0031652436     PISSN: 09481907     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1521-3862(199801)04:01<17::AID-CVDE17>3.0.CO;2-4     Document Type: Article

References (35)

1. R. G. Nuzzo, D. L. Allara, J. Am. Chem. Soc. 1983, 105, 4481.
2. A. Ulman, An Introduction to Ultrathin Organic Films: From Langmuir-Blodgett to Self-Assembly, Academic Press, Boston, MA 1991.
3. C. David, H. U. Müller, B. Völkel, M. Grunze, Proc. Int. Conf. on Micro-and Nanofabrication 1995, Microelectron. Eng. 1996, 30, 57.
4. H. U. Müller, C. David, B. Völkel, M. Grunze, J. Vac. Sci. Technol. B 1995, 13, 2846.
5. S. D. Evans, A. Ulman, K. E. Goppert-Berarducci, L. J. Gerenser, J. Am. Chem. Soc. 1991, 113, 5866.
6. C. Duschl, M. Liley, H. Vogel, Angew. Chem. Int. Ed. Engl. 1994, 33, 1274; Angew. Chem. 1994, 106, 1361.
7. C. Duschl, M. Liley, H. Vogel, Angew. Chem. Int. Ed. Engl. 1994, 33, 1274; Angew. Chem. 1994, 106, 1361.
8. S. Peschel, G. Schmid, Angew. Chem. Int. Ed. Engl. 1995, 34, 1442; Angew. Chem. 1995, 107, 1568.
9. S. Peschel, G. Schmid, Angew. Chem. Int. Ed. Engl. 1995, 34, 1442; Angew. Chem. 1995, 107, 1568.
10. M. Maskus, H. D. Abruña, Langmuir 1996, 12, 4455.
11. D. R. Jung, A. W. Czanderna, Crit. Rev. Solid State Mater. Sci. 1994, 19, 1.
12. D. Wacker, K. Weiss, U. Kazmaier, C. Wöll, Langmuir, in press.
13. T. Strunskus, M. Grunze, G. Kochendoerfer, C. Wöll Langmuir 1996, 12, 2712.
14. S. J. Potochnik, P.E. Pehrsson, D. S. Y. Hsu, J. M. Calvert, Langmuir 1995, 11, 1841.
15. N. L. Jeon, R. G. Nuzzo, Y. Xia, M. Mrksich, G. M. Whitesides, Langmuir 1995, 11, 3024.
16. N. L. Jeon, P. G. Clem, D. A. Payne, R. G. Nuzzo, Langmuir 1996, 12, 5350.
17. W. L. Gladfelter, D. C. Boyd, K. F. Jensen, Chem. Mater. 1989, 1, 339.
18. A. T. S. Wee, A. J. Murrell, N. K. Singh, D. O'Hare, J. S. Foord, J. Chem. Soc., Chem. Commun. 1990, 11.
19. L. H. Dubois, B. R. Zegarski, C.-T. Kao, R. G. Nuzzo, Surf. Sci. 1990, 236, 77.
20. A. C. Jones, S. A. Rushworth, J. Cryst. Growth 1990, 106, 252.
21. T. M. Baum, C. E. Larson, R. L. Jackson, Appl. Phys. Lett. 1989, 55, 1264.
22. F. M. Elms, R. N. Lamb, P. J. Pigram, M. G. Gardiner, B. J. Wood, C. L. Raston, J. Chem. Soc., Chem. Commun. 1992, 1423.
23. 3:119.6 eV.
24. C. D. Bain, E. B. Troughton, Y.-T. Tao, J. Evall, G. M. Whitesides, R. G. Nuzzo, J. Am. Chem. Soc. 1989, 111, 321.
25. E. Wiberg, E. Amberger, Hydrides of the Elements of Main Groups I-IV, Elsevier, Amsterdam 1971, Ch. 5.
26. Handbook of X-ray Photoelectron Spectroscopy, Perkin-Elmer Corporation, Physical Electronics Division, Eden Prairie, MN 1979.
27. 0 and I are the intensities of the Au 4f signal before and after alane deposition, respectively. A λ value of 45 Å was used in our calculations. See also H. S. Hansen, S. Tougaard, H. Biebuyck, J. Electron Spectros. Relat. Phenom. 1992, 58, 159.
28. a) J. Weiß, Ph.D. Thesis, University of Heidelberg 1997.
29. b) P. Wohlfahrt, Ph.D. Thesis, University of Mainz 1997.
30. A. Kumar, G. M. Whitesides, Appl. Phys. Lett. 1993, 63, 2002.
31. A. Kumar, H. A. Biebuyck, G. M. Whitesides, Langmuir 1994, 10, 1498.
32. J. L. Wilbur, A. Kumar, E. Kim, G. M. Whitesides, Adv. Mater. 1994, 6, 600.
33. J. K. Ruff, Inorg. Synth. 1967, 9, 30.
34. AFM measurements were performed with a Park Scientific Autoprobe CP System with a 80 μm scanner and a LFM (Lateral Force Microscopy) head using Ultralevers. The scan rate was 2 Hz in the contact mode with a force of about 44.8 nN.
35. H.-J. Himmel, K. Weiss, B. Jäger, O. Dannenberger, M. Grunze, C. Wöll, Langmuir 1997, 13, 4943.