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Volumn 402-404, Issue , 1998, Pages 206-210
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The effect of temperature on NH3-Si (111) interaction
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Author keywords
Ammonia; Auger electron spectroscopy (AES); Low energy electron diffraction (LEED); Nitrogen; Silicon
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Indexed keywords
ADSORPTION;
AMMONIA;
AUGER ELECTRON SPECTROSCOPY;
CHEMICAL BONDS;
CRYSTAL ORIENTATION;
LOW ENERGY ELECTRON DIFFRACTION;
NITROGEN;
PHOTOEMISSION;
SATURATION (MATERIALS COMPOSITION);
SURFACE PHENOMENA;
SURFACE ROUGHNESS;
THERMAL EFFECTS;
PHOTOEMISSION YIELD SPECTROSCOPY;
SEMICONDUCTING SILICON;
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EID: 0031622019
PISSN: 00396028
EISSN: None
Source Type: Journal
DOI: 10.1016/S0039-6028(97)01015-7 Document Type: Article |
Times cited : (5)
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References (16)
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